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77 GHz radar SoC · fab data

PCM / WAT data and SPC in the fab

What the fab measures on every wafer before it ships, how statistical process control keeps those numbers in line, and how the data links to the radar circuits and to production test.

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PCM / WAT data and SPC in the fab

Fab · manufacturing

Before a wafer leaves the fab, small test structures in the scribe lines between the dies (the PCM, process control monitor) are measured in the WAT (wafer acceptance test). These are not the radar circuits themselves but plain transistors, resistors, capacitors, via chains and RF structures, measured at typically 5–9 sites per wafer. The fab runs SPC (statistical process control) on these numbers to keep the process centred and stable, and ships the WAT data with every lot. For a radar SoC this data explains much of what later shows up at test: where the trims land, how much Tx power and NF margin there is, and the IDDQ baseline. It is the first box of the production test flow.

What WAT measures, and where it shows up in the radar chip

PCM / WAT parameterWhat it measuresRadar circuits affectedHow it shows up at test
Vt (linear / saturation), Idsat — NMOS and PMOSTransistor strength; the process cornerPA output power, LNA gain and NF, VCO tuning, digital speedTx power trim codes shift; at-speed Vmin; trims near their limits (bin 6)
Ioff, junction leakageLeakage per deviceIDDQ baseline, SRAM retention, sample-and-hold droopIDDQ limits and DPAT per corner
Sheet resistance: poly, N+/P+ diffusion, metalsResistor and interconnect valuesBandgap and bias resistors, IF filter corners, LDO output trimsTrim codes cluster toward one end of the range
Contact / via chain resistanceInterconnect integrityPower-grid IR drop, electromigration marginScan failures under IR drop; reliability risk
Gate-oxide capacitance (C-V), ToxOxide thickness and qualityVt and gm, gate-oxide reliability (TDDB)HVST fallout, IDDQ before/after stress
MIM / MOM capacitanceCapacitor densityIF filters, PLL loop filter, ADCFilter-corner trims, PLL bandwidth
RF structures: fT / fmax, inductor Q, varactor C-V, transmission-line lossHigh-frequency transistor and passive performancePA gain and Pout at 77 GHz, LNA NF, VCO phase noise and tuning range, coupler lossRF BIST/BISM: Tx power, NF, LO range (BIST page)

From WAT numbers to the transistor model

WAT does not measure the radar circuits. It measures single transistors and passives. Designers never use those numbers directly: they use a compact model (BSIM-family) whose parameters were fitted to the same kind of measurements. WAT checks, lot by lot, that the silicon still matches that model. Knowing how each WAT number connects to the large-signal and small-signal models explains why a WAT shift moves Tx power, NF or trims later.

p-well / substrate (body B) n+ source n+ drain gate (G) inversion channel L (channel length) Tox S D G Rg Rs Rd Cgs Cgd Cdb W into page
NMOS cross-section. The drawn L and W, the oxide thickness Tox and the doping set the intrinsic device; the red and blue labels are the parasitics that matter at 77 GHz: series resistances (Rg, Rs, Rd) and capacitances (Cgs, Cgd, Cdb). WAT has dedicated structures for each: long/short-channel transistors for L effects, C-V structures for Tox, and RF test structures for the parasitics.

Large-signal model: how the current flows

Linear (Vds < Vgs − Vt): Id = μ·Cox·(W/L)·[(Vgs − Vt)·Vds − Vds²/2] Saturation, long channel: Id = ½·μ·Cox·(W/L)·(Vgs − Vt)²·(1 + λ·Vds) Saturation, short channel (velocity-saturated): Id ≈ W·Cox·vsat·(Vgs − Vt) ∝ (Vgs − Vt)^α, α ≈ 1.2–1.5 Subthreshold (Vgs < Vt): Id = I0·exp((Vgs − Vt)/(n·kT/q)) slope SS = n·(kT/q)·ln10 ≈ 70–90 mV/dec DIBL: Vt(Vds) = Vt_lin − DIBL·(Vds − 50 mV)
1e-121e-101e-81e-61e-40.00.30.60.9Vgs (V)Id (A/µm)100 nA/µm(Vt criterion)Vds = 50 mVVds = VDDVt_lin 0.40 VVt_sat 0.31 VIoff 17 pA/µm (Vgs = 0)Idsat 821 µA/µmsubthreshold slope ≈ 81 mV/dec
Illustrative 28 nm-class NMOS, not foundry data. One Id–Vgs sweep at two drain voltages gives most of the transistor WAT: Vt_lin and Vt_sat where the current crosses a fixed criterion (their difference over ΔVds is DIBL), Ioff at Vgs = 0 and Vds = VDD, Idsat at Vgs = Vds = VDD, and the subthreshold slope. Log scale, so the off-current (pA) and on-current (hundreds of µA) fit on one plot.
WAT parameterHow it is extractedModel parameter it checksRadar circuit that feels it
Vt_lin, Vt_satId–Vgs at 50 mV and at VDD; constant-current (e.g. 100 nA·W/L) or max-gm extrapolationThreshold (VTH0), body effectBias points and headroom: mixers, VCO core, LDO pass devices, trim start values
DIBL(Vt_lin − Vt_sat) / ΔVdsShort-channel terms (ETA0 …)Output conductance → amplifier gain, current-source accuracy (DACs)
Idsat (µA/µm)Id at Vgs = Vds = VDDMobility and saturation velocity (U0, VSAT), series resistancePA output power, LNA gain, digital speed
Ioff, subthreshold slopeId at Vgs = 0, Vds = VDD; slope of log Id below VtSubthreshold parameters (NFACTOR, VOFF)IDDQ baseline, SRAM retention, sample-and-hold droop
Tox / Cox (C-V)Inversion capacitance of large MOS capacitorsOxide thickness (TOXE)gm per current, all capacitances, oxide reliability
Rsd, RgResistance vs. channel length; gate-finger structuresSeries-resistance and gate-resistance modelsgm degradation, fmax, LNA noise figure
fT, fmax (RF WAT)S-parameters on de-embedded RF transistors, extrapolated to unity current / power gainThe whole small-signal model at mmWavePA gain and Pout at 77 GHz, LNA NF, VCO and ×4 multiplier drive

Small-signal model: what the RF circuits see

Around a fixed bias point, the transistor behaves like the linear circuit below. This is the model an RF designer uses for the LNA, PA and mixer at 77 GHz, and its elements come straight from the large-signal model and the parasitics above.

GRgg′CgdCgsd′gm·vgs1/gdss′RsSRdDCdb→ Bvgs = v(g′) − v(s′)
Small-signal equivalent circuit (quasi-static). The controlled source gm·vgs is the gain; gds limits voltage gain; Cgs and Cgd load the input and feed output back to input (Miller); Rg, Rs and Rd waste power and add noise. At 77 GHz every one of these matters.
gm = ∂Id/∂Vgs ≈ 2·Id / (Vgs − Vt) (square law) gds = ∂Id/∂Vds ≈ λ·Id intrinsic gain = gm / gds Cgs ≈ ⅔·W·L·Cox + overlap Cgd ≈ overlap capacitance × W fT = gm / (2π·(Cgs + Cgd)) current-gain cut-off fmax ≈ √( fT / (8π·Rg·Cgd) ) power-gain cut-off (simplified)

Rule of thumb: a useful amplifier stage needs fmax of about 3–4 times the operating frequency, so a 77 GHz radar needs fmax of roughly 250–350 GHz or more. That is why RF WAT tracks fT and fmax, and why Rg (gate finger layout) and Cgd (overlap) are watched as closely as Vt.

fT / fmax calculator

Defaults: an illustrative multi-finger RF NMOS. Try doubling Rg (poor gate contact) or Cgd to see fmax fall.

fmax
–
fT
fmax / operating frequency

Corners and mismatch: from WAT spread to design margins

  • Process corners: the WAT distributions of NMOS and PMOS strength (Vt, Idsat) define the corner models: TT (typical), FF and SS (both fast or both slow), FS and SF (skewed). Radar blocks are designed to meet spec at every corner and temperature. A lot drifting toward SS lowers Idsat and therefore PA power, which the Tx power loop compensates with higher gain codes.
  • Mismatch: neighbouring identical transistors still differ randomly. Pelgrom's law, σ(ΔVt) = A_Vt / √(W·L), sets the random Vt spread; WAT measures it on matched pairs. It drives DAC INL, I/Q imbalance, comparator offset and current-mirror accuracy.
  • Why SPC on WAT protects the radar: a centred, capable process (the Cpk above) keeps every product inside the corners it was designed for, so trims converge, Tx power has margin and the calibration tables stay valid.

Digital impact of corners and mismatch

Corners and mismatch don't only shift analog and RF performance. They are also a main cause of digital failures, and a radar SoC has a large digital part (DSP, FFT accelerator, lockstep MCUs, several MB of SRAM for the radar cube). There are two separate mechanisms.

Corner + conditionWhat goes wrongWhy
SS, low V, high T (or low T at advanced nodes)Setup-time violations: logic too slow for the clockLow Idsat means slow gates. At 28 nm and below, temperature inversion can make cold, not hot, the slowest case
FF, high V, low THold-time violations: data races through too fastVery fast short paths beat the clock skew
FF, high TLeakage and power: IDDQ too high, supply droop, thermal runaway riskLow Vt and the exponential subthreshold current make Ioff rise steeply
FS / SF (skewed)Ratioed circuits fail: level shifters, SRAM write, keepersNMOS and PMOS strengths no longer balance
Mismatch-sensitive blockFailureWhy mismatch matters here
SRAM bit cellRead-disturb (reading flips the cell), write failure, slow access, retention loss at low voltageMinimum-size transistors (Pelgrom: small W·L gives large σVt) and millions of cells, so each mode needs ≈ 6σ margin
Sense amplifiers, comparatorsWrong decisionInput offset from Vt mismatch of the input pair
Flip-flops, synchronisersSetup/hold shift, longer metastability windowMismatch inside the latch pair
Clock treeExtra skewRandom buffer delay differences beyond what timing analysis assumed
  • Covered in design by: timing signoff at every corner, voltage and temperature, with on-chip-variation (OCV) derates for local mismatch; high-sigma SRAM bit-cell yield analysis; ageing margin, because NBTI and HCI slowly shift Vt over a 15-year life.
  • Caught at test by: at-speed scan with a frequency guard band at hot and cold (slow-corner and small-delay parts); VLV and Vmin screens and MBIST at low voltage (mismatch-weak SRAM cells, marginal paths); IDDQ and DPAT per corner (leakage outliers).
  • Why WAT helps here: each lot's corner explains its Vmin and at-speed fallout, and lets IDDQ and PAT limits be normalised per corner so good fast-corner parts aren't rejected as outliers.

Breakdown voltages

Breakdown tests ramp the voltage on a dedicated PCM structure until the current jumps past a compliance limit. The voltage at that point is the breakdown voltage (BV). The test is destructive, so it runs only on scribe-line structures at sample sites, never on the product dies. What matters is not only the mean but the low tail: a few early breakdowns point to extrinsic defects (weak oxide spots, particles) that become early-life failures in the field.

Breakdown parameterPCM structure and testTypical requirementWhy it matters for the radar chip
Gate-oxide breakdown (Vbd)Large-area and edge-intensive MOS capacitors; ramped voltage (V-ramp) to a current threshold. Core and thick IO oxide measured separatelySeveral × the max operating voltage; tight low tailSets the room for HVST (stress must stay safely below Vbd); oxide quality links to IDDQ and early-life fails
Drain-source breakdown (BVdss)Transistor with gate off; ramp the drain until the drain current exceeds the limit (avalanche or punch-through)Margin over the maximum drain swingThe PA drain swings to about 2 × VDD at 77 GHz. BVdss and hot-carrier limits cap the output power, which is why mmWave CMOS PAs use cascode or stacked transistors
Junction breakdown (BVj)N+/P-well and P+/N-well diodes in reverse biasMargin over supply + transientsSupply surges, IO and ESD diode behaviour; the continuity test uses these same diodes in forward bias
Inter-metal dielectric (IMD) breakdownComb / serpentine metal structures at minimum spacing; ramp between the combsAbove max line-to-line voltage, with marginLow-k back-end reliability (line-to-line TDDB) in dense digital and power grids
MIM / MOM capacitor breakdownCapacitor arrays, ramped to breakdownMargin over the rail the capacitor sits onOn-chip decoupling on the LDO rails, IF and PLL loop-filter capacitors
ESD clamp trigger / snapback (Vt1)ESD devices, measured with TLP (transmission-line pulse); often a characterisation test rather than every-lot WATTrigger below the oxide Vbd of the circuit it protectsRF-pad ESD must protect the LNA/PA without adding much capacitance at 77 GHz
V-ramp: V = V0 + k·t until I > I_compliance → record Vbd One-sided spec (only a lower limit): Cpk_lower = (μ − LSL) / 3σ Low tail: Weibull plot; a second, lower group = extrinsic defects

Breakdown voltage is a quick, one-shot check. Wafer-level reliability adds the time-dependent view: TDDB (time to breakdown at a constant stress voltage) and QBD (charge to breakdown). These predict lifetime at the operating voltage and are run by the foundry during process qualification and monitoring. The same SPC rules apply: watch the lower-tail percentile as well as the mean, because a shift of the tail shows up in the field long before the mean moves.

SPC: keeping each parameter in control

SPC separates two kinds of limits. Spec limits (LSL/USL) come from the design: outside them the wafer is out of spec. Control limits (LCL/UCL) come from the process's own history, normally the mean ± 3σ. A point outside the control limits, or a non-random pattern inside them, means something in the process has changed, usually long before parts go out of spec. That early warning is the point of SPC.

Illustrative example, not real fab data. Lot-mean NMOS Vt_sat with control limits from history (CL 450 mV, σ 6 mV, so UCL/LCL = 468/432 mV) and spec limits 420–480 mV. Lots 15–22 are all above the centre line: 8 in a row triggers run rule 4 and flags a process shift while every point is still inside the control limits. Lot 23 then goes beyond the UCL (rule 1). All lots are still inside spec, so SPC catches the drift before any wafer is rejected. Hover a point for its value.
Show data as a table
LotVt_sat (mV)Flag
1449—
2452—
3447—
4451—
5454—
6446—
7450—
8453—
9448—
10451—
11445—
12452—
13449—
14450—
154568-in-a-row above CL (rule 4)
164598-in-a-row above CL (rule 4)
174558-in-a-row above CL (rule 4)
184588-in-a-row above CL (rule 4)
194618-in-a-row above CL (rule 4)
204578-in-a-row above CL (rule 4)
214608-in-a-row above CL (rule 4)
224568-in-a-row above CL (rule 4)
23471beyond UCL (rule 1)
24452—
25448—
Run rule (Western Electric / Nelson)PatternWhat it usually means
1 · Beyond 3σOne point outside UCL or LCLA special cause: tool fault, wrong recipe, bad measurement
2 · 2 of 3 beyond 2σTwo of three consecutive points beyond 2σ on the same sideA shift is starting
3 · 4 of 5 beyond 1σFour of five consecutive points beyond 1σ on the same sideA small, sustained shift
4 · 8 in a row on one sideEight consecutive points above (or below) the centre lineThe process mean has moved (the example above)
Trend (Nelson)Six points steadily rising or fallingDrift: tool wear, consumables, chamber seasoning

Capability: Cp and Cpk

Cp = (USL − LSL) / 6σ spec width vs process spread Cpk = min(USL − μ, μ − LSL) / 3σ same, penalised for being off-centre Out of spec = Φ((LSL − μ)/σ) + 1 − Φ((USL − μ)/σ) Centred: Cpk 1.00 ≈ 2 700 ppm · 1.33 ≈ 63 ppm · 1.67 ≈ 0.6 ppm

Automotive customers commonly require Cpk ≥ 1.33 for stable parameters and ≥ 1.67 for critical ones, reviewed per parameter with the fab.

Cpk calculator

Defaults are the Vt_sat example above. Try μ = 458 (the shifted lots) to see Cpk drop.

Cpk
–
Cp
Expected out of spec

When a point goes out of control (OCAP)

  1. Hold the lot automatically in the fab's manufacturing system.
  2. Check the measurement first: re-measure, check the prober and the tester, and compare with the golden wafer.
  3. Find the cause with the out-of-control action plan (OCAP) for that parameter: the tool, chamber, recipe and consumable history of the lot.
  4. Disposition by the material review board (MRB): release, rework, scrap, or ship with a deviation. For automotive, a deviation needs the customer's agreement.
  5. Correct and verify: fix the tool or recipe, confirm the next lots are back in control, and update the control limits only if the process has been deliberately changed.

How PCM / WAT data is used downstream

UseHow
Wafer acceptanceA wafer fails WAT if too many sites are out of the WAT spec (for example more than 1 of 5–9 sites); failing wafers are not shipped.
Test correlationJoin WAT with wafer-sort results by lot/wafer to explain bin patterns, e.g. a Vt shift that pushes trims out of range (bin 6) or raises IDDQ.
Adaptive testUse the process corner to set trim search start values, and to normalise IDDQ and other PAT limits per corner so good fast-corner parts aren't rejected as outliers.
Yield prediction and excursionsModels from WAT predict sort yield; a WAT excursion triggers extra sampling or holds before the lot reaches test. Spatial patterns are analysed with wafer map signatures.
TraceabilityWAT is kept with the lot ID and joined to ECID data from test and field returns (see the test flow).
Parameter lists, sampling and limits are typical of foundry practice and meant for planning. The actual PCM set, WAT spec and SPC rules come from the foundry's process documents and are agreed with the customer.
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Glossary of abbreviations

Abbreviations are underlined with dots the first time they appear in each section. Hover to see the meaning; click to jump here. Use Search (Ctrl+K) to find an abbreviation anywhere on the page.

Radar system & ADAS

Abbr.Stands forNote
FCWForward Collision WarningWarns of an imminent frontal collision; stage before AEB.
FCTAFront Cross-Traffic AlertFront corner-radar function at junctions and driveways.
RCTBRear Cross-Traffic BrakingBrakes automatically when RCTA detects cross traffic while reversing.
DOWDoor-Opening WarningWarns before a door is opened into an approaching cyclist or car.
VRUVulnerable Road UserPedestrians, cyclists and motorcyclists.
TTCTime To CollisionRange divided by closing speed; triggers warnings and braking.
LRRLong-Range RadarFront radar, ≈ 200–300 m, narrow field of view.
MRRMid-Range Radar≈ 80–160 m, ±40–60° field of view.
SRRShort-Range RadarCorner radar, ≈ 30–80 m, ±75–90° field of view.
NCAPNew Car Assessment ProgrammeConsumer safety ratings (Euro NCAP, C-NCAP, IIHS …).
GSRGeneral Safety Regulation (EU) 2019/2144Makes AEB and other assistance functions mandatory in the EU.
CPDChild Presence DetectionIn-cabin sensing (often 60 GHz radar) that detects a child left in the car.
ACCAdaptive Cruise ControlKeeps distance to the car ahead; uses long-range front radar.
ADASAdvanced Driver-Assistance SystemsThe vehicle functions the radar serves.
AEBAutonomous Emergency BrakingBrakes automatically when a collision is imminent.
BSDBlind-Spot DetectionCorner-radar function.
LCALane-Change AssistCorner-radar function that warns of fast approaching vehicles.
RCTARear Cross-Traffic AlertRear corner-radar function when reversing.
L2SAE automation Level 2 (L3 = Level 3)Partial (L2) and conditional (L3) driving automation.
FMCWFrequency-Modulated Continuous WaveA linear chirp; range comes from the beat frequency f_b = S·2R/c.
FoVField of ViewAngular coverage in azimuth and elevation.
RCSRadar Cross SectionTarget reflectivity in dBsm (car ≈ 10, pedestrian ≈ −10…0).
dBsmDecibels relative to 1 m²Unit of RCS.
EIRPEffective Isotropic Radiated PowerTx power + antenna gain; limited by regulations.
MIMOMultiple-Input Multiple-OutputN_tx × N_rx channels form a larger virtual array.
TDMTime-Division MultiplexingOne Tx per chirp; v_max falls by a factor of N_tx.
BPMBinary Phase Modulation0/180° codes across chirps separate the Tx signals.
DDMADoppler-Division Multiple AccessEach Tx gets a slow-time phase ramp and separates in Doppler.
DoADirection of ArrivalAngle estimation over the virtual array.
DBFDigital BeamformingFFT or matched steering over array channels.
CFARConstant False Alarm RateAdaptive detection threshold (CA = cell-averaging, OS = ordered-statistic).
FFTFast Fourier TransformRange, Doppler and angle FFTs build the radar cube.
SNRSignal-to-Noise Ratio
MUSICMUltiple SIgnal ClassificationSubspace super-resolution DoA algorithm.
ESPRITEstimation of Signal Parameters via Rotational Invariance TechniquesSuper-resolution DoA algorithm.
IAAIterative Adaptive ApproachSuper-resolution spectral / DoA estimator.
DBSCANDensity-Based Spatial Clustering of Applications with NoiseGroups detections into objects.
EKFExtended Kalman FilterNonlinear tracking filter.
UKFUnscented Kalman FilterNonlinear tracking filter using sigma points.
IMMInteracting Multiple ModelTracker that mixes several motion models.
HWAHardware AcceleratorOn-chip FFT / radar processing engine.
RTSRadar Target SimulatorEcho generator for HIL and EOL testing.
HILHardware-in-the-LoopTesting the real sensor against simulated scenarios.
EOLEnd-of-LineFinal production test of a module or vehicle.

RF & analog front end

Abbr.Stands forNote
HPBWHalf-Power BeamwidthAngle between the −3 dB points of an antenna or array beam.
PDNPower Delivery NetworkRegulators, planes, decoupling and package paths that supply the chip.
PIPower IntegrityKeeping supply voltage within limits under load steps and noise.
EMIElectromagnetic InterferenceUnwanted emission or pick-up of electromagnetic energy.
BCIBulk Current InjectionImmunity test (ISO 11452-4) that injects RF current into a cable harness.
TIMThermal Interface MaterialGap pad or paste between board or package and the heat sink.
RFRadio FrequencyHere the 76–81 GHz signal.
LOLocal OscillatorThe chirp signal that drives the Tx and the Rx mixers.
IFIntermediate FrequencyThe beat / baseband signal after the mixer, DC–20 MHz.
PAPower AmplifierTx output stage, 12–14 dBm.
LNALow-Noise AmplifierFirst Rx stage; sets most of the NF.
NFNoise FigureNoise the receiver adds, in dB.
VGAVariable-Gain AmplifierProgrammable-gain stage (IF), or signed VGAs in the phase rotator.
TIATransimpedance AmplifierCurrent-to-voltage stage after a passive mixer.
HPFHigh-Pass FilterIn IF: removes leakage and DC, and equalises R⁻⁴.
LPFLow-Pass Filter
AAFAnti-Aliasing FilterLow-pass filter in front of the ADC.
PPFPolyphase FilterRC-CR network that generates I/Q.
I/QIn-phase / QuadratureTwo copies of a signal 90° apart.
IRRImage Rejection RatioHow well an I/Q path suppresses the mirror frequency.
SSBSingle SidebandA frequency shift in one direction only, e.g. the loopback offset.
BPSKBinary Phase-Shift Keying0/180° switching; produces ±f_m sidebands.
VMVector ModulatorI/Q-weighted phase rotator.
RTPSReflection-Type Phase ShifterHybrid coupler terminated by tunable loads.
P1dB1 dB compression pointInput (or output) level where gain drops by 1 dB.
IIP3Input third-order intercept pointLinearity figure; cascades with the gain before each stage.
PAEPower-Added Efficiency(P_out − P_in) / P_DC of a PA.
PsatSaturated output powerMaximum output power of a PA.
DSBDouble SidebandNoise figure counting both sidebands (typical for zero-IF mixers).
PGAProgrammable-Gain AmplifierIF VGA with digitally set gain steps.
AGCAutomatic Gain ControlLoop that sets the VGA gain from the signal level.
HD22nd-order Harmonic Distortion (HD3 = 3rd)Harmonics show up as ghost targets at 2×/3× range.
AM/PMAmplitude-to-phase conversionPhase change caused by amplitude or supply changes.
RLReturn LossMatch quality, in dB.
CplCoupler (directional coupler)Taps a small, known fraction (−15…−20 dB) of a signal for detection or loopback.
PDPower DetectorDiode or square-law RF-to-DC converter.
APCAutomatic Power ControlClosed loop from the power detector to the VGA/PA gain code.
DPDDigital PredistortionWideband PA linearisation used in comms; radar uses static gain/phase LUTs instead.
VSWRVoltage Standing-Wave RatioMismatch at the antenna/load; changes the delivered power.
CWContinuous WaveAn unmodulated single-frequency tone.
ENRExcess Noise RatioCalibrated output level of a noise source.
SiGeSilicon-Germanium (BiCMOS)Bipolar-plus-CMOS process used for earlier radar chips.
CMOSComplementary Metal-Oxide-SemiconductorRFCMOS = CMOS process with RF / mmWave capability.
RFCMOSRF-capable CMOSToday's single-chip radar process (e.g. 45/40/28/22 nm).
NMOSN-channel MOS transistor (PMOS = P-channel)
PTATProportional To Absolute TemperatureVoltage or current used by temperature sensors.
BGBandgap referenceTemperature-stable voltage reference (BG1/BG2 = two independent ones).
PVTProcess, Voltage, TemperatureVariation corners a design must cover.

LO, clock & synthesis

Abbr.Stands forNote
PLLPhase-Locked LoopLocks the VCO to the crystal and generates the ramp.
ADPLLAll-Digital PLLPLL with a TDC and a digital loop filter.
VCOVoltage-Controlled Oscillator≈ 19–20.25 GHz, multiplied ×4 to 77 GHz.
PFDPhase-Frequency DetectorCompares the divided VCO with the reference.
CPCharge Pump; also Chip ProbeIn a PLL: converts PFD pulses into loop-filter current. In test flows: wafer-level probe test.
TDCTime-to-Digital ConverterDigital phase detector of an ADPLL.
XTALCrystal (reference oscillator)40/50 MHz reference for PLL, ADC and digital.
DDSDirect Digital SynthesizerDigitally generated tone (IF test tone).
KvcoVCO gainTuning sensitivity in MHz/V; varies per band.
AFCAutomatic Frequency Calibration (band calibration)Picks the VCO capacitor-bank band before the PLL closes.
MMDMulti-Modulus DividerProgrammable divider in the PLL feedback, dithered by the ΣΔ modulator.
CMLCurrent-Mode LogicFast differential logic used for the first divider (prescaler) stages at 20 GHz.

Data conversion & digital

Abbr.Stands forNote
SNMStatic Noise MarginNoise an SRAM cell tolerates before flipping; read SNM is the critical one.
SEUSingle-Event UpsetBit flip caused by a particle strike (soft error).
SERSoft-Error RateRate of radiation-induced bit flips, in FIT per Mbit.
MBUMulti-Bit UpsetOne particle flips several neighbouring cells.
RDFRandom Dopant FluctuationRandom number of dopant atoms in a small channel; main cause of Vth mismatch.
LERLine-Edge RoughnessRough gate edges that add Vth variation in small devices.
NPSFNeighbourhood Pattern-Sensitive FaultMemory cell fails only for certain data in its neighbours.
SEC-DEDSingle-Error Correction, Double-Error DetectionECC code used on memory words (e.g. 64 + 8 bits).
ROMRead-Only MemoryMask-programmed memory for boot code and tables.
DRFData-Retention FaultMemory cell loses its value after a pause.
WLWord LineRow select line of a memory array.
BLBit LineColumn data line of a memory array (BL and its complement BLB).
OSROversampling Ratiofs / (2·BW) of a ΣΔ ADC; each doubling adds (2L+1)·3 dB of SQNR.
NTFNoise Transfer FunctionHow a ΣΔ loop shapes quantisation noise out of the signal band.
SNDRSignal-to-Noise-and-Distortion RatioENOB = (SNDR − 1.76) / 6.02.
GBWGain-Bandwidth productOp-amp figure of merit; sets filter and PGA accuracy at IF.
CMRRCommon-Mode Rejection RatioHow well a differential circuit rejects signals common to both inputs.
CSI-2MIPI Camera Serial Interface 2High-speed serial link used for raw radar data.
TSNTime-Sensitive NetworkingDeterministic automotive Ethernet (IEEE 802.1).
ADCAnalog-to-Digital ConverterMain Rx ADCs (ΣΔ) and the aux SAR ADC.
DACDigital-to-Analog ConverterRotator I/Q weights, bias, trim, test-tone generation.
SARSuccessive-Approximation Register ADCSlow, precise ADC used for monitoring.
CTContinuous-Time (CT-ΣΔ)Sigma-delta ADC with a continuous-time loop filter.
ENOBEffective Number of Bits
SFDRSpurious-Free Dynamic RangeTone relative to the largest spur.
THDTotal Harmonic Distortion
DRDynamic Range
INLIntegral NonlinearityDeviation from the ideal transfer line.
DNLDifferential NonlinearityDeviation of each step from 1 LSB.
LSBLeast Significant Bit (MSB = most significant)
DFEDigital Front EndDecimation, DC and I/Q correction, interference handling.
CICCascaded Integrator-CombMultiplier-free decimation filter.
FIRFinite Impulse Response filter
DSPDigital Signal Processor
MCUMicrocontroller Unit
CPUCentral Processing UnitE.g. the RF control CPU that runs chirps and monitors.
SoCSystem-on-Chip
ECUElectronic Control UnitVehicle computer that receives radar data.
SRAMStatic RAM (RAM = random-access memory)
ECCError-Correcting CodeMemory protection for functional safety.
DMADirect Memory Access
LUTLook-Up TableE.g. phase-code → (I, Q) DAC codes, Tx power vs. temperature.
FWFirmware (SW = software)
OTPOne-Time Programmable memoryHolds trims and IDs, like eFuse.
SPISerial Peripheral InterfaceConfiguration / test bus from host or ATE.
CANController Area Network (CAN-FD = Flexible Data-rate)Vehicle bus for object lists.
ETHEthernet (100/1000BASE-T1)Automotive single-pair Ethernet.
CSICamera Serial Interface (MIPI CSI-2)Streams raw radar data to a central SoC.
LVDSLow-Voltage Differential SignalingRaw-data debug / streaming interface.
GPIOGeneral-Purpose Input/Output
IOInput/Output

Power

Abbr.Stands forNote
LDOLow-Dropout regulatorLinear regulator; one per noise-sensitive domain.
PMICPower-Management ICExternal bucks, supervisors and watchdog.
PSRRPower-Supply Rejection RatioHow much supply ripple an LDO (or circuit) blocks.
UVUnder-Voltage (OV = Over-Voltage)Supply monitors, a safety mechanism.
OVOver-VoltageRail above its window; OV monitor protects gate oxides.
PORPower-On ResetHolds the chip in reset until all rails are valid.
BORBrown-Out ResetResets when a supply sags during operation.
ESREquivalent Series ResistanceOf the LDO output capacitor; its zero affects loop stability.
OCPOver-Current ProtectionCurrent limit on a regulator output.
IqQuiescent currentCurrent a regulator draws for itself with no load.
DLDODigital LDOSwitched pass-device array regulated by a comparator loop.
GNDGround

Test & production

Abbr.Stands forNote
EVBEvaluation BoardBoard that carries the chip on the bench with supplies, clock, interfaces and RF transitions.
SMUSource-Measure UnitPrecision instrument that forces voltage or current and measures the other.
OTAOver The AirMeasurement through antennas in a chamber instead of a cable or waveguide.
GSGGround-Signal-Ground probeRF wafer probe with a signal tip between two ground tips.
LRRMLine-Reflect-Reflect-Match calibrationOn-wafer VNA calibration method for mmWave probes.
SCPIStandard Commands for Programmable InstrumentsText command set used to automate instruments.
UPHUnits Per HourTest throughput of a tester and handler.
eFuseElectrically programmable fuseSilicided poly link blown by current; stores trim, ID and repair bits.
MTPMultiple-Time Programmable memorySmall NVM that can be rewritten a few times.
NVMNon-Volatile MemoryKeeps data without power: eFuse, OTP, MTP, flash.
VPPProgramming supply voltageSupply used only to program fuses or OTP.
CRCCyclic Redundancy CheckChecksum that detects corrupted data, e.g. trim words at boot.
RMAReturn Material AuthorizationA customer return, analysed through the 8D process.
8DEight DisciplinesStructured problem solving: team, describe, contain, root cause, correct, verify, prevent, close.
MSAMeasurement System AnalysisProves a measurement is precise and accurate enough (Gage R&R, bias, stability).
GRRGage Repeatability and Reproducibility%GRR < 10 % of tolerance is good.
BISTBuilt-In Self-TestOn-chip stimulus + measurement; result is pass/fail or a value checked against a limit.
BISMBuilt-In Self-MeasurementSame on-chip hardware, but the result is a calibrated value (dB, °, MHz) used for trim, calibration and trend.
DFTDesign for Test
ATEAutomatic Test EquipmentProduction tester.
ATPGAutomatic Test Pattern GenerationScan patterns for digital logic.
IDDQQuiescent supply-current testDetects leakage defects.
PMUParametric Measurement UnitATE DC source/measure channel.
CresContact resistanceProbe or socket contact resistance; measured with the Kelvin or two-current method.
FIMVForce Current, Measure VoltagePMU mode used for open/short (diode) tests.
FVMIForce Voltage, Measure CurrentPMU mode used for leakage and power-short tests.
IILInput leakage current, input Low (IIH = input High)Leakage limit per IO pin, typically |I| < 1 µA.
IIHInput leakage current, input High
ESDElectrostatic DischargePad protection diodes / clamps; the diode method uses them for continuity.
VDDPositive supply rail (VSS = ground / negative rail)
VSSGround / negative supply rail
DCRDC ResistanceE.g. of an RF shunt inductor, 0.5–3 Ω.
Hi-ZHigh impedance (Z)Output driver switched off; the pin floats.
OEOutput EnableControl that switches an output between driving and Hi-Z.
IOZOff-state output leakage (IOZH at VDDIO, IOZL at 0 V)Measured on a pin in Hi-Z; typically |I| < 1–10 µA.
VOHOutput High voltage threshold (VOL = Output Low)Tester comparator levels that decide 1 / Z / 0.
VOLOutput Low voltage threshold
HIGHZIEEE 1149.1 instruction that puts all outputs in Hi-Z
EXTESTIEEE 1149.1 external test instructionBoundary cells drive and sample the pins; used for interconnect and walking-Z tests.
RPCTReduced Pin-Count TestingTesting through JTAG / a few pins, so more sites fit on one tester.
BICSBuilt-In Current SensorOn-chip current monitor for IDDQ per power domain.
SPCStatistical Process Control
VNAVector Network AnalyzerLab instrument for S-parameters.
AWGArbitrary Waveform Generator
DMMDigital Multimeter
GPIBGeneral-Purpose Interface BusInstrument control bus (like LAN).

Safety, standards & regulation

Abbr.Stands forNote
PMHFProbabilistic Metric for random Hardware FailuresISO 26262 residual failure rate; < 100 FIT for ASIL B/C, < 10 FIT for D.
SEooCSafety Element out of ContextA part developed to ISO 26262 against assumed system requirements.
FMEAFailure Mode and Effects AnalysisQualitative analysis of failure modes; FMEDA adds rates and diagnostic coverage.
FITFailures In TimeFailures per 10⁹ device-hours.
MTTFMean Time To Failure
REDRadio Equipment Directive (EU 2014/53/EU)EU conformity framework for radio transmitters, including radar.
ASILAutomotive Safety Integrity LevelISO 26262 risk class A–D; radar typically ASIL-B.
ISOISO 26262 / ISO/SAE 21434 / ISO 11452Functional safety / cybersecurity / EMC immunity.
FTTIFault-Tolerant Time IntervalTime from fault to hazard; monitors must react within it.
FMEDAFailure Modes, Effects and Diagnostic Analysis
SPFMSingle-Point Fault MetricISO 26262 coverage metric.
LFMLatent Fault MetricISO 26262 coverage metric.
AECAutomotive Electronics Council (AEC-Q100 / Q200)Qualification of ICs / passives.
ETSIEuropean Telecommunications Standards InstituteEN 301 091 / EN 303 396 radar standards.
FCCFederal Communications CommissionUS rules, Part 95M for 76–81 GHz.
EMCElectromagnetic Compatibility
CISPRComité International Spécial des Perturbations RadioélectriquesCISPR 25: vehicle-component emissions.
OOBOut-of-Band (emission)

Digital DFT, stress & reliability

Abbr.Stands forNote
UHSTUnbiased Highly Accelerated Stress TestHAST without bias, 130 °C / 85 % RH; alternative to autoclave.
PTCPower Temperature CyclingTemperature cycling with the device powered on and off.
EDREndurance and Data RetentionQualification of non-volatile memory (AEC-Q100-005).
DPADestructive Physical AnalysisOpening and sectioning parts to inspect their construction and damage.
SEMScanning Electron MicroscopeHigh-magnification imaging of cross-sections and surfaces.
EDXEnergy-Dispersive X-ray spectroscopyElement analysis in the SEM: corrosion, contamination, IMC phases.
FIBFocused Ion BeamPrecise local cutting and imaging; also used for circuit edits.
LTPDLot Tolerance Percent DefectiveDefect rate a sampling plan rejects with given confidence; 0 / 231 ≈ 1 % at 90 %.
PCPreconditioningBake, moisture soak and reflow before environmental stress (JESD22-A113).
BLRBoard-Level ReliabilityReliability of the package soldered on a PCB (temperature cycling, drop, vibration).
SACTin-Silver-Copper solderLead-free solder alloy (e.g. SAC305) used for balls.
PPAPProduction Part Approval ProcessAutomotive approval package, includes the qualification report.
DRCDesign Rule CheckVerifies layout against foundry manufacturing rules.
LVSLayout Versus SchematicVerifies that the layout matches the schematic netlist.
PEXParasitic ExtractionExtracts resistance, capacitance (and inductance) of the layout for post-layout simulation.
AMSAnalog / Mixed-Signal simulationSimulation that combines transistor-level analog with digital models.
ECOEngineering Change OrderLate design fix; a metal-only ECO changes only upper masks.
SCRSilicon-Controlled RectifierThyristor; used as a compact ESD clamp, and the parasitic structure behind latch-up.
GGNMOSGrounded-Gate NMOSESD clamp that works by parasitic-bipolar snapback.
SEScan EnableSelects shift (SE = 1) or functional capture (SE = 0) in scan flops.
SAFStuck-At FaultNode permanently 0 or 1.
TDFTransition Delay FaultNode slow to rise or fall; needs at-speed test.
STAStatic Timing AnalysisFinds the longest paths for timing-aware ATPG.
OCVOn-Chip VariationTiming derates in STA that account for local (mismatch) variation across the die.
OCCOn-Chip Clock ControllerGates exact launch/capture pulses from the PLL for at-speed test.
LOCLaunch-On-CaptureAt-speed scheme; also called broadside.
LOSLaunch-On-ShiftAt-speed scheme; SE must switch at speed.
EDTEmbedded Deterministic TestScan compression (decompressor + compactor).
LFSRLinear-Feedback Shift RegisterPseudo-random sequence generator.
PRPGPseudo-Random Pattern GeneratorLFSR that feeds the scan chains in LBIST.
MISRMultiple-Input Signature RegisterCompresses responses into one signature.
STUMPSSelf-Test Using MISR and Parallel Shift-register sequence generatorStandard LBIST architecture.
LBISTLogic BISTOn-chip random-pattern scan test; used at key-on.
MBISTMemory BISTOn-chip March-algorithm test of SRAMs.
BIRABuilt-In Redundancy AnalysisComputes which spare rows/columns repair a memory.
BISRBuilt-In Self-RepairLoads the repair from eFuse at boot.
IRIR dropSupply voltage drop (current × resistance), high during scan shift.
JTAGJoint Test Action Group (IEEE 1149.1)Boundary scan and test access port.
TAPTest Access PortJTAG pins TCK, TMS, TDI, TDO, TRST.
BSDLBoundary Scan Description LanguageDescribes a chip's JTAG boundary-scan cells.
IJTAGInternal JTAG (IEEE 1687)Network for accessing on-chip instruments.
MUXMultiplexerSelects one of N inputs; in test, routes sub-block nodes to shared instruments.
ATBAnalog Test BusChip-wide wire pair (force + sense) that test muxes connect sub-block nodes to.
TGTransmission GateParallel NMOS + PMOS switch; passes the full voltage range.
SPDTSingle-Pole Double-Throw switchOne input to one of two outputs (SP4T = one of four).
BBMBreak-Before-MakeSwitching order that opens the old path before closing the new one.
ICLInstrument Connectivity Language (PDL = Procedural Description Language)IJTAG description files.
ECIDElectronic Chip IDUnique per-die ID for traceability.
HVSTHigh-Voltage Stress TestShort over-voltage on the core rail to activate latent oxide defects.
VLVVery-Low-Voltage testTest below nominal V to expose resistive defects.
VminMinimum operating voltageThe pass/fail edge in a shmoo; an outlier Vmin flags a defect.
PATPart Average Testing (AEC-Q001)Outlier limits at robust μ ± 6σ.
DPATDynamic Part Average TestingPAT limits recalculated per lot or wafer.
GDBNGood Die in Bad NeighbourhoodWafer-map screen that rejects dies in defect clusters.
NNRNearest-Neighbour ResidualCompares a die's parameter with its wafer neighbours.
DPPMDefective Parts Per MillionShipped-quality metric; automotive target ≪ 1.
FTFinal TestPackage-level production test.
SLTSystem-Level TestFunctional test by booting the application.
PCMProcess Control MonitorTest structures in the scribe lines, measured by the fab (see WAT).
WATWafer Acceptance TestFab's electrical test of PCM structures before shipping wafers.
OSATOutsourced Semiconductor Assembly and TestCompany that packages and tests the dies.
QAQuality AssuranceSample-based outgoing inspection and audits.
CpProcess capability (Cp)(USL − LSL) / 6σ: spec width vs process spread.
CpkProcess capability indexmin(USL − μ, μ − LSL) / 3σ; automotive often ≥ 1.33, critical ≥ 1.67.
USLUpper Spec Limit (LSL = Lower Spec Limit)Design limits; outside them the part is out of spec.
LSLLower Spec Limit
UCLUpper Control Limit (LCL = Lower Control Limit)Process limits from history, usually mean ± 3σ.
LCLLower Control Limit
OCAPOut-of-Control Action PlanDocumented steps when an SPC rule fires.
MRBMaterial Review BoardDecides what happens to held material: release, rework, scrap or deviation.
MIMMetal-Insulator-Metal capacitor (MOM = Metal-Oxide-Metal)Precision on-chip capacitors.
MOMMetal-Oxide-Metal (finger) capacitor
BSIMBerkeley Short-channel IGFET ModelIndustry-standard compact transistor model family used in design kits.
VtThreshold voltageGate voltage where the channel turns on; Vt_lin at low Vds, Vt_sat at VDD.
IdsatSaturation drain currentId at Vgs = Vds = VDD, per µm of width; transistor strength.
IoffOff-state leakage currentId at Vgs = 0, Vds = VDD.
DIBLDrain-Induced Barrier LoweringVt drop per volt of Vds in short-channel devices.
SSSubthreshold swing (also SS = slow-slow process corner)mV of Vgs per decade of Id below Vt; ≈ 60 mV/dec ideal at room temperature.
TTTypical-typical process cornerFF = fast-fast; FS / SF = skewed NMOS / PMOS corners.
FFFast-fast process corner
gmTransconductance∂Id/∂Vgs; the transistor's gain.
gdsOutput conductance∂Id/∂Vds; limits voltage gain (intrinsic gain = gm/gds).
CoxGate-oxide capacitance per areaεox / Tox.
ToxGate-oxide thicknessMeasured with C-V structures in WAT.
fTTransit (unity current-gain) frequency≈ gm / 2π(Cgs + Cgd).
fmaxMaximum oscillation (unity power-gain) frequencyNeeds ≈ 3–4× the operating frequency for useful gain.
VbdGate-oxide breakdown voltageVoltage where oxide current jumps past compliance in a V-ramp test.
BVBreakdown VoltageBVdss = drain-source (gate off), BVj = junction.
BVdssDrain-source breakdown voltageTransistor off-state breakdown; limits PA drain swing.
BVjJunction breakdown voltageReverse breakdown of N+/P-well or P+/N-well diodes.
TLPTransmission-Line PulseESD device characterisation with short, high-current pulses.
QBDCharge to breakdownTotal charge an oxide passes before breaking down (reliability).
IMDInter-Metal DielectricInsulator between metal lines/layers; tested with comb structures.
CMPChemical-Mechanical PlanarizationPolishing step that flattens each layer; source of centre, edge and ring signatures.
OPCOptical Proximity CorrectionMask shape corrections; weak spots (hotspots) can fail per reticle shot.
EBREdge Bead RemovalRemoves resist build-up at the wafer edge.
D0Defect densityRandom defects per unit area; baseline yield Y ≈ e^(−D0·A).
HTOLHigh-Temperature Operating Life≈ 1000 h biased at max temperature (AEC-Q100).
ELFREarly Life Failure RateShort high-temperature operation of a large sample.
TCTemperature CyclingPackage and interconnect fatigue test.
THBTemperature-Humidity-Bias85 °C / 85% RH with bias.
HASTHighly Accelerated Stress Test130 °C / 85% RH with bias.
RHRelative Humidity
HTSLHigh-Temperature Storage LifeUnbiased bake.
HBMHuman-Body Model (ESD)
CDMCharged-Device Model (ESD)
LULatch-UpJESD78 test.
EMElectromigrationMetal wear-out under current (wafer-level reliability).
TDDBTime-Dependent Dielectric BreakdownGate-oxide wear-out.
HCIHot-Carrier InjectionTransistor degradation mechanism.
NBTINegative-Bias Temperature InstabilityPMOS threshold drift.

PCB, package & materials

Abbr.Stands forNote
TCBThermo-Compression BondingFlip-chip attach with heat and force per die; fine pitch, low warpage.
MUFMolded UnderfillMold compound that also fills the gap under a flip-chip die.
CSAMC-mode Scanning Acoustic MicroscopyUltrasound imaging of voids and delamination inside packages.
AOIAutomated Optical InspectionCamera inspection of RDL, bumps and balls in the assembly line.
KGDKnown-Good DieDie that passed wafer sort and is released for assembly.
WLPWafer-Level PackagePackage built on the whole wafer (fan-in) or a reconstituted wafer (fan-out).
PCBPrinted Circuit Board
RDLRedistribution LayerThin-film Cu wiring that routes die pads to balls (fan-out) or bumps.
UBMUnder-Bump MetallisationMetal stack between die/RDL pad and the solder.
FOWLPFan-Out Wafer-Level PackageDie embedded in mold with RDL fanning out to balls; eWLB is one type.
CSPChip-Scale PackagePackage only slightly larger than the die (FC-CSP = flip-chip CSP).
AiPAntenna-in-PackageAntennas built into package layers.
IMCIntermetallic CompoundLayer formed between solder and UBM/pad; grows with time and temperature.
CTECoefficient of Thermal ExpansionMismatch between materials drives solder and bump fatigue.
MSLMoisture Sensitivity LevelJ-STD-020 rating: how long a package may sit out of dry pack before reflow.
ELKExtreme Low-k dielectricFragile back-end dielectric in advanced nodes; cracks under bump stress.
NSMDNon-Solder-Mask-Defined padPCB pad style that improves solder-joint fatigue life.
DkDielectric constantSets line impedance and antenna tuning; shifts with moisture.
DfDissipation factorDielectric loss; key for RF loss at 77 GHz.
C-SAMC-mode Scanning Acoustic MicroscopyNon-destructive imaging of delamination and voids.
PBOPolybenzoxazolePolymer dielectric used in RDL (like polyimide).
EOSElectrical OverstressDamage from overvoltage or overcurrent beyond ESD events.
BGABall Grid ArrayFC-BGA = flip-chip BGA.
eWLBembedded Wafer-Level Ball-grid-arrayFan-out package with low RF loss.
AoPAntenna-on-Package
LoPLaunch-on-PackageRF launched from package into waveguide / antenna.
GCPWGrounded Coplanar WaveguidePCB transmission line at the ball launch.
SIWSubstrate-Integrated WaveguideWaveguide formed with via fences in the PCB.
FR4Flame-Retardant epoxy-glass laminateStandard low-cost PCB material.
ENEPIGElectroless Nickel, Electroless Palladium, Immersion GoldPCB surface finish.
ImAgImmersion SilverPCB surface finish.
HASLHot-Air Solder LevelingSurface finish; too rough/uneven for 77 GHz.
PBTPolybutylene terephthalate (PC = polycarbonate)Radome plastics.
HFSSHigh-Frequency Structure Simulator (Ansys)3D EM simulator (CST = Dassault's equivalent).